Impact of LER and Random Dopant Fluctuations on FinFET Matching Performance. | E. Baravelli, M. Jurczak, N. Speciale, K. De Meyer, A. Dixit | 2007 |
- Silicon Nanoelectronics Workshop |
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Impact of Line-Edge Roughness on FinFET Matching Performance. | E. Baravelli, A. Dixit, R. Rooyackers, M. Jurczak, N. Speciale, K. De Meyer | 2007 |
- IEEE Trans. Electron Devices |
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