Impact of Stochastic Mismatch on Measured SRAM Performance of FinFETs with Resist/Spacer-Defined Fins: Role of Line-Edge-Roughness. | A. Dixit, K. G. Anil, E. Baravelli, P. Roussel, A. Mercha, C. Gustin, M. Bamal, E. Grossar, R. Rooyackers, E. Augendre, M. Jurczak, S. Biesemans, K. De Meyer | 2006 |